Investigation of pulsed ultraviolet laser annealing of Sb/SnO2 thin films on the structural, optical and electrical properties

被引：10
|
作者：
Wang, Chun-Min [1 ]
Huang, Chun-Chieh [2 ]
Kuo, Jui-Chao [1 ]
Huang, Jow-Lay [1 ,3 ,4 ]
机构：
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan
[2] Cheng Shiu Univ, Dept Elect Engn, Kaohsiung 833, Taiwan
[3] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[4] Natl Cheng Kung Univ, Res Ctr Energy Technol & Strategy, Tainan 701, Taiwan
来源：
SURFACE & COATINGS TECHNOLOGY | 2013年 / 231卷
关键词：
Sputtering; Laser processing; SnO2; Sb; Transparent conductive oxide (TCO); SNO2; COATINGS; LAYERS;
D O I：
10.1016/j.surfcoat.2012.07.065
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Sb/SnO2 bi-layer films were prepared using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition. The optimal parameters of SnO2 thin films were found to be dependent on the processing conditions of vacuum pressure and flow ratio of O-2/(O-2+Ar). The as deposited bi-layer films were treated by ex situ pulsed ultraviolet laser beam at 355 nm for the assistance of Sb-ion with SnO2 interface. This paper takes a closer look at the characteristics of the laser irradiation effect of Sb/SnO(2)bi-layer films on the optical and electrical behavior and the interface microstructure of Sb/SnO2 by high resolution transmission electron microscopy (HR-TEM). After UV pulse laser irradiation of bi-layer films, crystalline Sb between amorphous Sb and SnO2 nanocrystalline thin films was observed. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：374 / 379
页数：6
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