CMOS-compatible wells for integrated high-speed screening arrays

被引：0

作者：

Gray, BL ^{[1
]}

Moerman, R ^{[1
]}

van den Doel, R ^{[1
]}

Dietrich, HRC ^{[1
]}

Iordanov, VP ^{[1
]}

Pham, NP ^{[1
]}

Sarro, PM ^{[1
]}

Bossche, A ^{[1
]}

Vellekoop, MJ ^{[1
]}

机构：

[1] Delft Univ Technol, Elect Instrumentat Lab, DIMES, NL-2628 CD Delft, Netherlands

来源：

BIOMEDICAL NANOTECHNOLOGY ARCHITECTURES AND APPLICATIONS | 2002年 / 4626卷

关键词：

high-speed screening; high-throughput screening; nanoliter wells; polymer MEMS; NADH; microinstrumentation;

D O I：

10.1117/12.472071

中图分类号：

Q81 [生物工程学（生物技术）]; Q93 [微生物学];

学科分类号：

071005 ; 0836 ; 090102 ; 100705 ;

摘要：

This paper explores the use of photopatternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nanoliter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nanoliter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 x 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electrospray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5, and 1 millimolar NADH solutions using external optics.

引用

页码：103 / 108

页数：6

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