The research on the performance of the Micro-machined gyroscope at low ambient pressure

被引：0

作者：

Zhao, Qiancheng ^{[1
]}

Lin, Langtao ^{[1
]}

Cui, Jian ^{[1
]}

Liu, Dachuan ^{[1
]}

Chi, Xiaozhu ^{[1
]}

Yan, Guizhen ^{[1
]}

机构：

[1] Peking Univ, Natl Key Lab Micro Nano Fabricat Technol, Inst Microelect, Beijing 100871, Peoples R China

来源：

PROCEEDINGS OF THE THIRD INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY | 2008年

关键词：

silicon micromechanical gyroscope; acuum; cale factor; uality factor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposed an effective method to test some key parameters of the micro-machined gyroscope at low ambient pressure condition including quality factor, amplitude of the drive signal, bandwidth and scale factor. The results demonstrated that the best working pressure must confine some pressure range.

引用

页码：21 / 24

页数：4

共 4 条

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[2]

LELAND RP, 2005, IEEE SENSORS J, V5

[3] A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes [J].

Mochida, Y ;

Tamura, M ;

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SENSORS AND ACTUATORS A-PHYSICAL, 2000, 80 (02) :170-178

[4] Micromachined inertial sensors [J].

Yazdi, N ;

Ayazi, F ;

Najafi, K .

PROCEEDINGS OF THE IEEE, 1998, 86 (08) :1640-1659

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