Technological Investigation of LTCC-Based Micro-electro-mechanical Systems (MEMS) to improve reliability and accuracy

被引：0

作者：

Lenz, Christian ^{[1
]}

Ziesche, Steffen ^{[1
]}

Partsch, Uwe ^{[1
]}

Neubert, Holger ^{[2
]}

机构：

[1] Fraunhofer Inst Ceram Technol & Syst, Dresden, Germany

[2] Tech Univ Dresden, Inst Electromech & Elect Design, Dresden, Germany

来源：

2013 EUROPEAN MICROELECTRONICS PACKAGING CONFERENCE (EMPC) | 2013年

关键词：

MEMS; LTCC; Force Sensor; Yield;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The Low Temperature Co-fired Ceramics (LTCC) process is a promising technology for the production of innovative Micro-Electro-Mechanical Systems (MEMS). However, a deep understanding of this technology, in order to achieve a high production yield, accuracy and reliability, is required. Subject of this study is to investigate the shrinkage and material properties of differently structured LTCC substrates based on the material system GT951 as a function of various technological fabrication parameters. The intention behind is to control the behavior of the MEMS component precisely during the different steps of the manufacturing process.

引用

页数：6

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