Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

被引：40
作者：
Meskinis, S.
Kopustinskas, V.
Slapikas, K.
Tamulevicius, S.
Guobiene, A.
Gudaitis, R.
Grigaliunas, V.
机构：
[1] Kaunas Univ Technol, Inst Phys Elect, LT-50131 Kaunas, Lithuania
[2] Kaunas Univ Technol, Dept Phys, LT-50131 Kaunas, Lithuania
来源：
THIN SOLID FILMS | 2006年 / 515卷 / 02期
关键词：
DLC films; ion beam deposition; contact angle with water; UV-VIS transmittance; imprint lithography; anti-sticking layers;
D O I：
10.1016/j.tsf.2005.12.223
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ion beam deposited hydrogenated undoped as well as SiOx(SiOx + N-2, SiOx + Ar) doped DLC thin films were deposited and evaluated as possible anti-adhesive layers for nanoimprint lithography. Film surface contact angle with water was investigated as a measure of the surface free energy and anti-sticking properties. Contact angle of the DLC films was independent of SiOx doping and ion beam energy. Air-annealing resistance in terms of the contact angle with water of the synthesized diamond like carbon films was investigated. Optical transmittance spectra of the DLC films in UV-VIS range were measured to investigate it as possible anti-sticking layers for UV imprint lithography applications. DLC films with the most promising combination of the UV absorption and anti-sticking properties were revealed. Preliminary imprint tests with uncoated and thin DLC film coated hot imprint stamps were performed. (c) 2005 Elsevier B.V. All rights reserved.
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收藏
页码：636 / 639
页数：4
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