Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube

被引：9
|
作者：
Rykaczewski, K. [1 ]
Henry, M. R. [1 ]
Fedorov, A. G. [1 ]
机构：
[1] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
来源：
APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 11期
关键词：
MONTE-CARLO-SIMULATION; IN-SITU CONTROL; SECONDARY-ELECTRON; OHMIC CONTACTS; MICROSCOPY; IMAGES;
D O I：
10.1063/1.3225553
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Amorphous carbon deposited via electron beam induced deposition (EBID) is frequently used to make a low-temperature Ohmic contact with low electrical resistance and improved mechanical characteristics of the multiwall nanotube (MWNT) substrate or MWNT-MWNT interface. However, influence of the MWNT on the EBID process has not been quantified. In this work, we experimentally and theoretically investigate the growth dynamics of EBID of residual hydrocarbons in presence of a MWNT. We demonstrate that the properties of MWNT do not impact amorphous carbon deposition process. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3225553]
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页数：3
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