Growth of p-Type Tin(II) Monoxide Thin Films by Atomic Layer Deposition from Bis(1-dimethylamino-2-methyl-2propoxy)tin and H2O

被引：80

作者：

Han, Jeong Hwan ^{[1
]}

Chung, Yoon Jang ^{[1
]}

Park, Bo Keun ^{[1
]}

Kim, Seong Keun ^{[2
]}

Kim, Hyo-Suk ^{[1
]}

Kim, Chang Gyoun ^{[1
]}

Chung, Taek-Mo ^{[1
]}

机构：

[1] Korea Res Inst Chem Technol, Div Adv Mat, Taejon 305600, South Korea

[2] Korea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea

来源：

CHEMISTRY OF MATERIALS | 2014年 / 26卷 / 21期

关键词：

TIN; TRANSISTORS; OXIDES;

D O I：

10.1021/cm503112v

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：6088 / 6091

页数：4

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