A MEMS-based super fast dew point hygrometer-construction and medical applications

被引：18

作者：

Jachowicz, Ryszard S. ^{[1
]}

Weremczuk, Jerzy ^{[1
]}

Paczesny, Daniel ^{[1
]}

Tarapata, Grzegorz ^{[1
]}

机构：

[1] Warsaw Univ Technol, Inst Elect Syst, PL-00665 Warsaw, Poland

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2009年 / 20卷 / 12期

关键词：

humidity sensor; dew point hygrometer; humidity sensors in medicine; HUMIDITY SENSORS;

D O I：

10.1088/0957-0233/20/12/124008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper shows how MEMS (micro-electro-mechanical system) technology and a modified principle of fast temperature control (by heat injection instead of careful control of cooling) can considerably improve the dynamic parameters of dew point hygrometers. Some aspects of MEMS-type integrated sensor construction and technology, whole measurement system design, the control algorithm to run the system as well as empirical dynamic parameters from the tests are discussed too. The hygrometer can easily obtain five to six measurements per second with an uncertainty of less than 0.3 K. The meter range is between -10 degrees C and 40 degrees C dew point. In the second part of the paper (section 2), two different successful applications in medicine based on fast humidity measurements have been discussed. Some specific constructions of these super fast dew point hygrometers based on a MEMS sensor as well as limited empirical results from clinical tests have been reported too.

引用

页数：10

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