A low-temperature-grown oxide diode as a new switch element for high-density, nonvolatile memories

被引:223
作者
Lee, Myoung-Jae [1 ]
Seo, Sunae
Kim, Dong-Chirl
Ahn, Seung-Eon
Seo, David H.
Yoo, In-Kyeong
Baek, In-Gyu
Kim, Dong-Sik
Byun, Ik-Su
Kim, Soo-Hong
Hwang, In-Rok
Kim, Jin-Soo
Jeon, Sang-Ho
Park, Bae Ho
机构
[1] Samsung Adv Inst Technol, Nano Devices Lab, Suwon 440600, South Korea
[2] Konkuk Univ, Dept Phys, Seoul 143701, South Korea
[3] Samsung Elect Co Ltd, Semicond R&D Ctr, Proc Dev Team, Suwon 440600, South Korea
[4] Inha Tech Coll, Dept Syst & Comp Engn, Inchon 402753, South Korea
关键词
D O I
10.1002/adma.200601025
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A one-diode/one-resistor structure, Pt/NiO/Pt/p-NiOx/n-TiOx/Pt, has been fabricated. This novel structure exhibits bistable resistance switching under forward bias, while the diode suppresses resistance switching in the Pt/NiO/Pt memory cell under reverse bias (see figure). Its low processing temperature and small cell size, as well as excellent rectifying characteristics, make this Pt/p-NiOx/n-TiOx/Pt diode structure a promising switch element for high-density, nonvolatile memory devices with 3D stack and cross-point structures.
引用
收藏
页码:73 / +
页数:5
相关论文
共 15 条
[1]   Electrical characterisation of NiO/ZnO structures [J].
Auret, FD ;
Wu, L ;
Meyer, WE ;
Nel, JM ;
Legodi, TJ ;
Hayes, M .
11TH INTERNATIONAL CONFERENCE ON II-VI COMPOUNDS (II-VI 2003), PROCEEDINGS, 2004, 1 (04) :674-677
[2]   Highly scalable non-volatile resistive memory using simple binary oxide driven by asymmetric unipolar voltage pulses [J].
Baek, IG ;
Lee, MS ;
Seo, S ;
Lee, MJ ;
Seo, DH ;
Suh, DS ;
Park, JC ;
Park, SO ;
Kim, HS ;
Yoo, IK ;
Chung, UI ;
Moon, JT .
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, :587-590
[3]   p-type behavior in phosphorus-doped (Zn,Mg)O device structures [J].
Heo, YW ;
Kwon, YW ;
Li, Y ;
Pearton, SJ ;
Norton, DP .
APPLIED PHYSICS LETTERS, 2004, 84 (18) :3474-3476
[4]   Fabrication of transparent p-n heterojunction thin film diodes based entirely on oxide semiconductors [J].
Kudo, A ;
Yanagi, H ;
Ueda, K ;
Hosono, H ;
Kawazoe, H ;
Yano, Y .
APPLIED PHYSICS LETTERS, 1999, 75 (18) :2851-2853
[5]  
MAKINO T, IN PRESS DIAMOND REL
[6]   A p-type amorphous oxide semiconductor and room temperature fabrication of amorphous oxide p-n heterojunction diodes [J].
Narushima, S ;
Mizoguchi, H ;
Shimizu, K ;
Ueda, K ;
Ohta, H ;
Hirano, M ;
Kamiya, T ;
Hosono, H .
ADVANCED MATERIALS, 2003, 15 (17) :1409-1413
[7]   PREPARATION OF TRANSPARENT, ELECTRICALLY CONDUCTING ZNO FILM FROM ZINC ACETATE AND ALKOXIDE [J].
OHYA, Y ;
SAIKI, H ;
TAKAHASHI, Y .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (15) :4099-4103
[8]   Oxide thin film diode fabricated by liquid-phase method [J].
Ohya, Y ;
Ueda, M ;
Takahashi, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (9A) :4738-4742
[9]  
Park K. C., 1970, Journal of Non-Crystalline Solids, V2, P284, DOI 10.1016/0022-3093(70)90145-6
[10]   Oxygen vacancies as active sites for water dissociation on rutile TiO2(110) -: art. no. 266104 [J].
Schaub, R ;
Thostrup, P ;
Lopez, N ;
Lægsgaard, E ;
Stensgaard, I ;
Norskov, JK ;
Besenbacher, F .
PHYSICAL REVIEW LETTERS, 2001, 87 (26) :266104-1