MoS2/HfO2/Silicon-On-Insulator Dual-Photogating Transistor with Ambipolar Photoresponsivity for High-Resolution Light Wavelength Detection

被引:30
作者
Deng, Jianan [1 ]
Zong, Lingyi [2 ]
Zhu, Mingsai [1 ]
Liao, Fuyou [2 ]
Xie, Yuying [1 ]
Guo, Zhongxun [2 ]
Liu, Jian [1 ]
Lu, Bingrui [1 ]
Wang, Jianlu [3 ]
Hu, Weida [3 ]
Zhou, Peng [2 ]
Bao, Wenzhong [2 ]
Wan, Jing [1 ]
机构
[1] Fudan Univ, Sch Informat Sci & Technol, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[2] Fudan Univ, Sch Microelect, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
关键词
light wavelength detection; MoS2; photodetector; photogating effect; silicon-on-insulator; tunable ambipolar photoresponsivity; LAYER MOS2; PHOTODETECTOR;
D O I
10.1002/adfm.201906242
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Photogating detectors based on 2D materials attract significant research interests. However, most of these photodetectors are only sensitive to the incident intensities and lack the ability to distinguish different wavelengths. Color imaging based on these detectors usually requires additional optical filter arrays to collect red, green, and blue (RGB) colors in different photodetectors to restore the true color of one pixel. In this study, an MoS2/HfO2/silicon-on-insulator field effect phototransistor with wavelength distinguishing ability is presented, where the photogating effect can be simultaneously formed in the top MoS2 gate and bottom Si substrate gate. These two individual photogating effects can reduce and increase the read current in the middle 12 nm Si channel, respectively. Thus, by tuning the applied voltages on these two gates, the device can be used to obtain tunable ambipolar photoresponsivity from +7000 A W-1 (Si bottom gate dominated) to 0 A W-1 (balanced), and finally to -8000 A W-1 (MoS2 gate dominated). In addition, the experimental results show that the corresponding top gate voltage to the zero responsivity (0 A W-1) point can be positively shifted by the increasing of incident wavelength with high resolution up to 2 nm and is insensitive to the incident intensity.
引用
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页数:9
相关论文
共 22 条
[1]  
Ali A, 2017, INT EL DEVICES MEET
[2]   High-precision semiconductor wavelength sensor based on a double-layer photo diode [J].
Amthor, Thomas ;
Hofmann, Christoph S. ;
Knorz, Juergen ;
Weidemueller, Matthias .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (09)
[3]  
Bayer B., 1976, U.S. Patent, Patent No. 3971065
[4]   Sonochemical exfoliation and photodetection properties of MoS2 Nanosheets [J].
Bhakhar, Sanjay A. ;
Patel, Nashreen F. ;
Zankat, Chetan K. ;
Tannarana, Mohit ;
Solanki, G. K. ;
Patel, K. D. ;
Pathak, V. M. ;
Pataniya, Pratik .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 98 :13-18
[5]   An SOI Photodetector With Field-Induced Embedded Diode Showing High Responsivity and Tunable Response Spectrum by Backgate [J].
Cao, X. -Y. ;
Lin, W. -S. ;
Liu, H. -B. ;
Deng, J. -N. ;
Arsalan, M. ;
Zhu, K. -M. ;
Chen, Y. -F. ;
Wan, J. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018, 65 (12) :5412-5418
[6]   Sea-Trial of Optical Ethernet Modems for Underwater Wireless Communications [J].
Cossu, Giulio ;
Sturniolo, Alessandro ;
Messa, Alessandro ;
Grechi, Simone ;
Costa, Daniele ;
Bartolini, Andrea ;
Scaradozzi, David ;
Caiti, Andrea ;
Ciaramella, Ernesto .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2018, 36 (23) :5371-5380
[7]   Interface Coupled Photodetector (ICPD) With High Photoresponsivity Based on Silicon-on-Insulator Substrate (SOI) [J].
Deng, Jianan ;
Shao, Jinhai ;
Lu, Bingrui ;
Chen, Yifang ;
Zaslavsky, Alexander ;
Cristoloveanu, Sorin ;
Bawedin, Maryline ;
Wan, Jing .
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2018, 6 (01) :557-564
[8]   Photogating in Low Dimensional Photodetectors [J].
Fang, Hehai ;
Hu, Weida .
ADVANCED SCIENCE, 2017, 4 (12)
[9]   Colorimetric porous photonic bandgap sensors with integrated CMOS color detectors [J].
Fang, Xiaoyue ;
Hsiao, Vincent K. S. ;
Chodavarapu, Vamsy P. ;
Titus, Albert H. ;
Cartwright, Alexander N. .
IEEE SENSORS JOURNAL, 2006, 6 (03) :661-667
[10]   Anomalous and Highly Efficient InAs Nanowire Phototransistors Based on Majority Carrier Transport at Room Temperature [J].
Guo, Nan ;
Hu, Weida ;
Liao, Lei ;
Yip, SenPo ;
Ho, Johnny C. ;
Miao, Jinshui ;
Zhang, Zhi ;
Zou, Jin ;
Jiang, Tao ;
Wu, Shiwei ;
Chen, Xiaoshuang ;
Lu, Wei .
ADVANCED MATERIALS, 2014, 26 (48) :8203-8209