Microstructure evolution during electromigration in eutectic SnPb solder bumps

被引:1
|
作者
Lu, CM [1 ]
Shao, TL [1 ]
Yang, CJ [1 ]
Chen, C [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
关键词
D O I
10.1557/JMR.2004.0305
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A technique has been developed to facilitate analysis of the microstructural evolution of solder bumps after current stressing. Eutectic SnPb solders were connected to under-bump metallization (UBM) of Ti/Cr-Cu/Cu and pad metallization of Cu/Ni/Au. It was found that the Cu6Sn5 compounds on the cathode/chip side dissolved after the current stressing by 5 x 10(3) A/cm(2) at 150 degreesC for 218 h. However, on the anode/chip side, they were transformed into (NixCu1-x)(3)Sn-4 in the center region of the UBM, and they were converted into (Cu-y,Ni1-y)(6)Sn-5 on the periphery of the UBM. For both cathode/substrate and anode/substrate ends, (Cu-y,Ni1-y)(6)Sn-5 compounds were transformed into (Ni-x,Cu1-x)(3)Sn-4. In addition, the bumps failed at cathode/chip end due to serious damage of the UBM and the Al pad. A failure mechanism induced by electromigration is proposed in this paper.
引用
收藏
页码:2394 / 2401
页数:8
相关论文
共 50 条
  • [1] Microstructure evolution during electromigration in eutectic SnPb solder bumps
    C. M. Lu
    T. L. Shao
    C. J. Yang
    Chih Chen
    Journal of Materials Research, 2004, 19 : 2394 - 2401
  • [2] Effects of electromigration on microstructural evolution of eutectic SnPb flip chip solder bumps
    Kim, Dae-Gon
    Moon, Won-Chul
    Jung, Seung-Boo
    MICROELECTRONIC ENGINEERING, 2006, 83 (11-12) : 2391 - 2395
  • [3] Electromigration in eutectic SnPb solder bumps with Ni/Cu UBM
    Chiu, SH
    Liang, SW
    Chen, C
    Lin, SS
    Chou, CM
    Liu, YC
    Chen, KH
    2005 10TH INTERNATIONAL SYMPOSIUM ON ADVANCED PACKAGING MATERIALS: PROCESSES, PROPERTIES AND INTERFACES, 2005, : 63 - 65
  • [4] Microstructural evolution during electromigration in eutectic SnAg solder bumps
    Chen, YH
    Shao, TL
    Liu, PC
    Chen, C
    Chou, T
    JOURNAL OF MATERIALS RESEARCH, 2005, 20 (09) : 2432 - 2442
  • [5] Microstructural Evolution During Electromigration in Eutectic SnAg Solder Bumps
    Y. H. Chen
    T. L. Shao
    P. C. Liu
    Chih Chen
    T. Chou
    Journal of Materials Research, 2005, 20 (9) : 2432 - 2442
  • [6] Electromigration in eutectic SnPb solder lines
    Huynh, QT
    Liu, CY
    Chen, C
    Tu, KN
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (08) : 4332 - 4335
  • [7] Electromigration behavior of eutectic SnPb solder
    Choi, Jae-Young
    Lee, Sang-Su
    Joo, Young-Chang
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2002, 41 (12): : 7487 - 7490
  • [8] Electromigration behavior of eutectic SnPb solder
    Choi, JY
    Lee, SS
    Paik, JM
    Joo, YC
    ADVANCES IN ELECTRONIC MATERIALS AND PACKAGING 2001, 2001, : 417 - 420
  • [9] Electromigration behavior of eutectic SnPb solder
    Choi, JY
    Lee, SS
    Joo, YC
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (12): : 7487 - 7490
  • [10] Electromigration induced microstructure and morphological changes in eutectic SnPb solder joints
    A. Lee
    C.E. Ho
    K.N. Subramanian
    Journal of Materials Research, 2007, 22 : 3265 - 3272