Microstructure and related properties of vapour deposited amorphous Sb2Se3 thin films

The initial growth stages and the growth morphology of 10-1000 nm thick films of amorphous Sb2Se3 obtain ed by thermal evaporation were studied under a broad range of vacuum deposition conditions. General grain growth phenomena with increasing film thickness were observed on a film free surface resulting in a columnar internal structure. The formation of inclined columns in obliquely deposited films occurred, with the vapour incidence angle being related to the column orientation via 'tangent rule'. It is shown that the film microhardness and refractive index are structurally dependent. The significance of the results obtained for the application of Sb2Se3 films in optical recording systems is discussed. Copyright (C) 1996 Elsevier Science Ltd.