High-bandwidth hard disk drive tracking using a moving-slider MEMS microactuator

被引：4

作者：

White, M ^{[1
]}

Hirano, T ^{[1
]}

Yang, H ^{[1
]}

Scott, K ^{[1
]}

Pattanaik, S ^{[1
]}

Huang, FY ^{[1
]}

机构：

[1] Hitachi Global Storage Technol, San Jose, CA 95120 USA

来源：

8TH IEEE INTERNATIONAL WORKSHOP ON ADVANCED MOTION CONTROL, PROCEEDINGS | 2004年

关键词：

D O I：

10.1109/AMC.2004.1297684

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A moving-slider microactuator that enables both high stroke and good linearity for high track pitch HDDs (hard disk drives) was investigated. A new microactuator design called a "bipolar microactuator" was proposed that maintains proper slider grounding. A new microactuator fabrication technique was developed that allows the bonding pads to be manufactured on the sidewall of the microactuator chip for easier assembly into an HDD. The microactuator was used to achieve an open loop servo bandwidth of 8 kHz at 80 kHz sampling rate in a server-class HDD. Higher bandwidths may be achieved with higher sampling rates. A description of the dual-stage control scheme is presented.

引用

页码：299 / 304

页数：6

共 7 条

[1] Piezoelectric microactuator for dual stage control [J].

Evans, RB ;

Griesbach, JS ;

Messner, WC .

IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (02) :977-982

[2]

FAN LS, 1994, P SOL STAT SENS ACT, P38

[3] High-bandwidth HDD tracking servo by a moving-slider micro-actuator [J].

Hirano, T ;

Fan, LS ;

Semba, T ;

Lee, WY ;

Hong, J ;

Pattanaik, S ;

Webb, P ;

Juan, WH ;

Chan, S .

IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) :3670-3672

[4]

HIRANO T, 2002, Patent No. 6495944

[5]

Schroeck S. J., 1999, Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251), P4122, DOI 10.1109/ACC.1999.786322

[6] Development of a Φ-shaped actuated suspension for 100-kTPI hard disk drives [J].

Tokuyama, M ;

Shimizu, T ;

Masuda, H ;

Nakamura, S ;

Hanya, M ;

Iriuchijima, O ;

Soga, J .

IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (04) :1884-1886

[7]

White MT, 2003, P AMER CONTR CONF, P2535

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