Micro-Cutting with Diamond Tool Micro-Patterned by Femtosecond Laser

被引:19
|
作者
Kim, Jaegu [1 ]
Je, Tae-Jin [1 ]
Cho, Sung-Hak [1 ]
Jeon, Eun-Chae [1 ]
Whang, Kyung-Hyun [1 ]
机构
[1] Korea Inst Machinery & Mat, Taejon 305343, South Korea
关键词
Micro-cutting; Micro-pattern; Diamond machining; Femtosecond laser; SURFACES;
D O I
10.1007/s12541-014-0440-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The demand for micro-scale surface machining has been steadily increasing, and various methods have been introduced Among these, microcutting with a diamond tool removes material by making multiple cutting passes. However, many passes are needed to generate micropatterns over a large area. To overcome the drawbacks of this time-consuming process, we propose a novel method, which uses a micropatterned diamond tool. A 220-fs-pulsed Ti: Sapphire laser is used to create micropatterns on the edge line of a rectangular diamond tool. A six-axis motion stage is used to align the edge line and flank surface of the diamond tool with respect to the focal point of the laser beam. Using a simple laser direct-writing method and a 100x objective lens (NA: 0.8), lines <= 2 mu m in width, 20 mu m in length, and 10 mu m in separation were fabricated along the 1-mm edge line of a bulk diamond tool. The micropatterned diamond cutting tool was then used to successfully produce micropatterns on the surface of nickel (Ni)-electroformed on SKD-61. This novel process provides an efficient means of multiple micropattern generation for molding applications, such as those required for optics and biotechnology, using only a single pass of a diamond cutting tool.
引用
收藏
页码:1081 / 1085
页数:5
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