Fabrication of two-dimensional InP-based photonic crystals by chlorine based chemically assisted ion beam etching

被引：36

作者：

Mulot, M

Anand, S

Ferrini, R

Wild, B

Houdré, R

Moosburger, J

Forchel, A

机构：

[1] Royal Inst Technol, Dept Microelect & Informat Technol, S-16440 Kista, Sweden

[2] Ecole Polytech Fed Lausanne, Inst Photon & Electron Quant, CH-1015 Lausanne, Switzerland

[3] Univ Wurzburg, Lehrstuhl Tech Phys, D-97074 Wurzburg, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 02期

关键词：

D O I：

10.1116/1.1688353

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two-dimensional photonic crystals (PhCs) were etched into InP/(Ga,In)(As,P) planar waveguides using chlorine-based chemical assisted ion beam etching (CAIBE). The processed PhCs were optically characterized by measuring transmission through simple slabs and one-dimensional cavities. The optical performances inside the photonic band gap are much better compared to both previously reported CAIBE results and results obtained with other etching methods. In particular, we measured a record quality factor of 310 for one-dimensional cavities fabricated in this material system. (C) 2004 American Vacuum Society.

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页码：707 / 709

页数：3

相关论文

共 10 条

[1] Separation of radiation and absorption losses in two-dimensional photonic crystal single defect cavities [J].

Alvarado-Rodriguez, I ;

Yablonovitch, E .

JOURNAL OF APPLIED PHYSICS, 2002, 92 (11) :6399-6402

[2] Photonic crystals and microdisk cavities based on GaInAsP-InP system [J].

Baba, T .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1997, 3 (03) :808-830

[3] Radiation losses of waveguide-based two-dimensional photonic crystals:: Positive role of the substrate [J].

Benisty, H ;

Labilloy, D ;

Weisbuch, C ;

Smith, CJM ;

Krauss, TF ;

Cassagne, D ;

Béraud, A ;

Jouanin, C .

APPLIED PHYSICS LETTERS, 2000, 76 (05) :532-534

[4] Hole depth- and shape-induced radiation losses in two-dimensional photonic crystals [J].

Ferrini, R ;

Lombardet, B ;

Wild, B ;

Houdré, R ;

Duan, GH .

APPLIED PHYSICS LETTERS, 2003, 82 (07) :1009-1011

[5] Radiation losses in planar photonic crystals:: two-dimensional representation of hole depth and shape by an imaginary dielectric constant [J].

Ferrini, R ;

Houdré, R ;

Benisty, H ;

Qiu, M ;

Moosburger, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 2003, 20 (03) :469-478

[6] Optical study of two-dimensional InP-based photonic crystals by internal light source technique [J].

Ferrini, R ;

Leuenberger, D ;

Mulot, M ;

Qiu, M ;

Moosburger, J ;

Kamp, M ;

Forchel, A ;

Anand, S ;

Houdré, R .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 2002, 38 (07) :786-799

[7]

Ferrini R, 2002, ELECTRON LETT, V38, P962, DOI 10.1049/e1:20020666

[8] Low-loss InP-based photonic-crystal waveguides etched with Ar/Cl2 chemically assisted ion beam etching [J].

Mulot, M ;

Anand, S ;

Swillo, M ;

Qiu, M ;

Jaskorzynska, B ;

Talneau, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02) :900-903

[9] Dry etching of photonic crystals in InP based materials [J].

Mulot, M ;

Anand, S ;

Carlström, CF ;

Swillo, M ;

Taineau, A .

PHYSICA SCRIPTA, 2002, T101 :106-109

[10] Time-domain 2D modeling of slab-waveguide-based photonic-crystal devices in the presence of radiation losses [J].

Qiu, M ;

Jaskorzynska, B ;

Swillo, M ;

Benisty, H .

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2002, 34 (05) :387-393