Focused ion beam milled CoPt magnetic force microscopy tips for high resolution domain images

被引：61

作者：

Gao, L ^{[1
]}

Yue, LP

Yokota, T

Skomski, R

Liou, SH

Takahoshi, H

Saito, H

Ishio, S

机构：

[1] Univ Nebraska, Dept Phys & Astron, Lincoln, NE 68588 USA

[2] Univ Nebraska, Ctr Mat Res & Anal, Lincoln, NE 68588 USA

[3] Akita Univ, Dept Mat Sci & Engn, Akita 010, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2004年 / 40卷 / 04期

基金：

日本学术振兴会; 美国国家科学基金会;

关键词：

domain images; focused ion beam technology; magnetic force microscopy; magnetic recording;

D O I：

10.1109/TMAG.2004.829173

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-coereivity CoPt magnetic force microscope tips have been modified by focused ion beam milling to improve the resolution of magnetic domain images. The magnetic materials around the apex have been removed, leaving a 30-nm diameter magnetic particle at the tip end. Due to the smaller amount of magnetic material, the stray field from this new tip is significantly reduced, and the spatial resolution of the magnetic domain images is improved. The tip is used to obtain high-resolution domain images of a CoCrPt-SiO2/Ru perpendicular recording medium with linear recording densities from 800 to 1000 kfci. Magnetic patterns of 900 kfci, corresponding to a bit size of 28 nm, are well resolved. From the analysis of the power spectrum of the track profiles for these images, a spatial resolution as good as 11 nm under ambient conditions with a commercial magnetic force microscope is achieved.

引用

页码：2194 / 2196

页数：3