Self-separated hydrothermal lead zirconate titanate thick films for high frequency transducer applications

被引：27

作者：

Zhu, B. P. ^{[1
,2
,3
,4
]}

Zhou, Q. F. ^{[1
,2
]}

Shi, J. ^{[3
,4
]}

Shung, K. K. ^{[1
,2
]}

Irisawa, S. ^{[5
]}

Takeuchi, S. ^{[5
]}

机构：

[1] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA

[2] Univ So Calif, Transducer Resource Ctr, NIH, Los Angeles, CA 90089 USA

[3] Wuhan Univ, Minist Educ, Dept Phys, Wuhan 430072, Peoples R China

[4] Wuhan Univ, Minist Educ, Key Lab Acoust & Photon Mat & Devices, Wuhan 430072, Peoples R China

[5] Toin Univ Yokohama, Grad Sch Engn, Med Engn Course, Yokohama, Kanagawa 2258501, Japan

来源：

APPLIED PHYSICS LETTERS | 2009年 / 94卷 / 10期

关键词：

annealing; dielectric losses; dielectric polarisation; dielectric thin films; lead compounds; permittivity; piezoelectric materials; scanning electron microscopy; ultrasonic transducers; ULTRASONIC TRANSDUCER; ELECTRICAL-PROPERTIES; DEPOSITION;

D O I：

10.1063/1.3095504

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using a simple rapid heating process, Pb(Zr0.52Ti0.48)O-3 (PZT) thick films prepared by hydrothermal method were separated from a Ti substrate. Scanning electron microscopy (SEM) revealed that the self-separated films were crack-free. After solution infiltration and high temperature annealing, the PZT thick films were shown to possess good electric properties. At 1 kHz, the dielectric constant and the loss were 593 and 0.05, respectively. The remnant polarization was 30.0 mu C/cm(2) at room temperature. A high frequency single element ultrasound transducer fabricated with these films showed a bandwidth at -6 dB of 73% at a center frequency of 67 MHz.

引用

页数：3

共 15 条

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