共 24 条
[3]
High-speed scanning of piezo-probes for nano-fabrication
[J].
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME,
1998, 120 (03)
:617-622
[6]
Modeling piezoelectric stack actuators for control of micromanipulation
[J].
IEEE CONTROL SYSTEMS MAGAZINE,
1997, 17 (03)
:69-79