Perpendicular coercive force of thick CoFeB thin films grown on silicon substrate

The room-temperature magnetic properties of CoFeB thin films grown on silicon substrate were investigated. Large perpendicular coercive forces in CoFeB thin films with thickness up to 172 nm were observed. The value of the perpendicular coercive force is 1850 Oe as the thickness of the CoFeB layer is 38 nm. The large perpendicular coercive force indicates the presence of intrinsic perpendicular magnetic anisotropy in thick CoFeB layer with thickness up to 172 nm, which originates from (300) texture in CoFeB layer. The strength of perpendicular magnetic anisotropy of CoFeB depends on annealing temperature. (C) 2014 Elsevier B.V. All rights reserved.