Plasma Structure in the Extraction Region of a Hybrid Negative Ion Source

被引:0
作者
Taccogna, F. [1 ]
Longo, S. [1 ]
Capitelli, M. [1 ]
Schneider, R. [2 ]
机构
[1] CNR, Ist Metodol Inorgan & Plasmi, Via Amendola 122-D, I-70126 Bari, Italy
[2] Max Planck Inst Plasma Phys, D-17491 Greifswald, Germany
来源
NEGATIVE IONS, BEAMS AND SOURCES | 2009年 / 1097卷
关键词
RF-ICP negative ion source; extraction region; PIC-MCC model; MAGNETIC-FIELD; H-IONS; SIMULATION; TRANSPORT; HYDROGEN; DYNAMICS; KINETICS; FILTER;
D O I
暂无
中图分类号
O59 [应用物理学];
学科分类号
摘要
Production, destruction and transport of negative ions in the extraction region of a hybrid negative ion source are investigated with a one-dimensional Particle-in-Cell electrostatic code. The influence of the plasma grid bias and of the magnetic filter on the plasma parameter profiles is taken into account. In particular, a transition from classical to complete reverse sheath is observed using a positively biased plasma grid, while the effect of the magnetic filter is relatively small proofing that H- production is dominated by surface neutral conversion.
引用
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页码:65 / +
页数:2
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