Design, Fabrication, and Assembly of an Optical Biosensor Probe Package for OCT (Optical Coherence Tomography) Application

被引：8

作者：

Premachandran, C. S. ^{[1
]}

Khairyanto, Ahmad ^{[1
]}

Sheng, Kelvin Chen Wei ^{[1
]}

Singh, Janak ^{[1
]}

Teo, Jason ^{[1
]}

Xu Yingshun ^{[2
]}

Chen Nanguang ^{[2
]}

Sheppard, Colin ^{[2
]}

Olivo, Malini ^{[3
,4
]}

机构：

[1] ASTAR, Inst Microelect, Singapore 117685, Singapore

[2] Natl Univ Singapore, Dept Bioengn, Singapore 117576, Singapore

[3] Natl Canc Ctr, Div Med Sci, Singapore 1696190, Singapore

[4] ASTAR, Bioopt Imaging Grp, Singapore Bioimaging Consortium, Singapore 138667, Singapore

来源：

IEEE TRANSACTIONS ON ADVANCED PACKAGING | 2009年 / 32卷 / 02期

关键词：

Biosensor; micro-electro-mechanical system (MEMS); MEMS packaging; micromirror; optical coherence tomography (OCT); optical probe; silicon optical bench (SiOB); 3-D MEMS;

D O I：

10.1109/TADVP.2009.2013658

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A miniaturized optical bioprobe package is developed using a 3-D micromirror and is tested for bio-imaging application. A silicon optical bench is designed and micromachined to assemble the fiber, lens, and the 3-D micromirror device. A 45 degrees angle trench is used to place the micromirror to achieve larger scanning range. Trace lines are formed on the optical bench and are connected to silicon micromirror using solder. A GRIN lens with lower numerical aperture has been used to focus the optical beam onto the micromirror. The bioprobe is packaged and is tested in a time domain optical coherence tomography (OCT) setup and optical image is obtained for plant tissue.

引用

页码：417 / 422

页数：6

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