Composition profiles from TiN/NbN multilayers: elastic and inelastic electron scattering techniques compared

被引：0
作者：
Lloyd, SJ
Molina-Aldareguia, JM
机构：
[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
[2] CEIT, San Sebastian 20018, Spain
来源：
ELECTRON MICROSCOPY AND ANALYSIS 2003 | 2004年 / 179期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A TiN/NbN multilayer has been examined by Fresnel contrast analysis and energy filtered image series in the TEM for a range of foil thickness. Good agreement between the composition profile determined by the two techniques was obtained if the lower resolution of the EFTEM images was taken into account.
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页码：291 / 294
页数：4
相关论文
共 7 条
[1]   MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS [J].
CHU, X ;
BARNETT, SA .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4403-4411
[2]   The development of Fresnel contrast analysis, and the interpretation of mean inner potential profiles at interfaces [J].
Dunin-Borkowski, RE .
ULTRAMICROSCOPY, 2000, 83 (3-4) :193-216
[3]  
LLOYD SJ, 2003, UNPUB
[4]   Deformation structures under indentations in TiN/NbN single-crystal multilayers deposited by magnetron sputtering at different bombarding ion energies [J].
Molina-Aldareguia, JM ;
Lloyd, SJ ;
Odén, M ;
Joelsson, T ;
Hultman, L ;
Clegg, WJ .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 2002, 82 (10) :1983-1992
[5]   DIRAC-FOCK CALCULATIONS OF X-RAY-SCATTERING FACTORS AND CONTRIBUTIONS TO THE MEAN INNER POTENTIAL FOR ELECTRON-SCATTERING [J].
REZ, D ;
REZ, P ;
GRANT, I .
ACTA CRYSTALLOGRAPHICA SECTION A, 1994, 50 :481-497
[6]  
STOBBS WM, 1992, FUTURE DEV METALS CE, P279
[7]   Image-spectroscopy - I. The advantages of increased spectral information for compositional EFTEM analysis [J].
Thomas, PJ ;
Midgley, PA .
ULTRAMICROSCOPY, 2001, 88 (03) :179-186
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