Growth of Single-Walled Carbon Nanotubes by Hot-Filament Assisted Chemical Vapor Deposition below 500°C

被引：9

作者：

Ishikawa, Yutaka ^{[1
]}

Ishizuka, Kei ^{[1
]}

机构：

[1] Nippon Inst Technol, Dept Elect & Elect Engn, Saitama 3458501, Japan

来源：

APPLIED PHYSICS EXPRESS | 2009年 / 2卷 / 04期

关键词：

LOW-TEMPERATURE SYNTHESIS; ALCOHOL;

D O I：

10.1143/APEX.2.045001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single-walled carbon nanotubes (SWCNTs) were grown at low temperatures by chemical vapor deposition (CVD) using a carbon filament. The growth experiment was carried out in a mixture of ethanol vapor and Ar gas that contains 3% H-2, using Co as a catalyst. SWCNTs were obtained after the growth at 425 degrees C for 30 min. The results were significantly dependent on the temperature of the filament. Moreover, when the catalyst in the reaction chamber was exposed to ethanol vapor up to the start of catalyst reduction, SWCNTs were synthesized at 400 degrees C and vertically grown at 450 degrees C. The thickness of the SWCNT film was 3.0 mu m for the growth period of 30 min. (C) 2009 The Japan Society of Applied Physics

引用

页码：0450011 / 0450013

页数：3

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