Low-loss and high index-contrast tantalum pentoxide microring resonators and grating couplers on silicon substrates

被引：35

作者：

Rabiei, Payam ^{[1
]}

Rao, Ashutosh

Chiles, Jeff

Ma, Jichi

Fathpour, Sasan ^{[2
,3
]}

机构：

[1] Partow Technol LLC, Orlando, FL 32816 USA

[2] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32816 USA

[3] Univ Cent Florida, Dept Elect & Comp Engn, Orlando, FL 32816 USA

来源：

OPTICS LETTERS | 2014年 / 39卷 / 18期

关键词：

WAVE-GUIDES;

D O I：

10.1364/OL.39.005379

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A platform for high index-contrast integrated photonics based on tantalum pentoxide submicrometer waveguides on silicon substrates is introduced. The platform allows demonstration of microring resonators with loaded quality factor, Q, of 67,000 and waveguides with a propagation loss of 4.9 dB/cm. Grating couplers, with an insertion loss of similar to 6 dB per coupler and 3 dB bandwidth of similar to 50 nm, are also demonstrated and integrated with microring resonators. (C) 2014 Optical Society of America

引用

页码：5379 / 5382

页数：4