Low-loss and high index-contrast tantalum pentoxide microring resonators and grating couplers on silicon substrates

被引:35
作者
Rabiei, Payam [1 ]
Rao, Ashutosh
Chiles, Jeff
Ma, Jichi
Fathpour, Sasan [2 ,3 ]
机构
[1] Partow Technol LLC, Orlando, FL 32816 USA
[2] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32816 USA
[3] Univ Cent Florida, Dept Elect & Comp Engn, Orlando, FL 32816 USA
关键词
WAVE-GUIDES;
D O I
10.1364/OL.39.005379
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A platform for high index-contrast integrated photonics based on tantalum pentoxide submicrometer waveguides on silicon substrates is introduced. The platform allows demonstration of microring resonators with loaded quality factor, Q, of 67,000 and waveguides with a propagation loss of 4.9 dB/cm. Grating couplers, with an insertion loss of similar to 6 dB per coupler and 3 dB bandwidth of similar to 50 nm, are also demonstrated and integrated with microring resonators. (C) 2014 Optical Society of America
引用
收藏
页码:5379 / 5382
页数:4
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