Mechanism of lattice relaxation in the theory of ion beam mixing

被引:1
作者
Serba, PV [1 ]
Blinov, YF [1 ]
机构
[1] Taganrog State Univ Radioengn, Taganrog 347928, Russia
关键词
relaxation; mixing; ion implantation;
D O I
10.1016/S0168-583X(99)00593-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Mechanism of lattice relaxation during ion beam mixing is considered. The physical nature of lattice relaxation mechanism is connected with the action of concentration stresses. The relaxation flux arose when the total atomic concentration differs from equilibrium. The dynamic of relaxation process is considered. It is shown that the deviation of total atomic concentration is decreased due to relaxation. The uniform relaxation during the mixing takes place when the relaxation speed is higher than the collisional mixing speed. In other cases the equilibrium distribution of total atomic concentration is established some time after ion irradiation. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:231 / 234
页数:4
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