HfO2/SiO2 multilayer enhanced aluminum alloy-based dual-wavelength high reflective optics

被引:14
作者
Wang, Angela Q. [1 ,2 ]
Wang, Jue [2 ]
D'lallo, Michael J. [2 ]
Platten, Jim E. [2 ]
Crifasi, Joseph C. [3 ]
Roy, Brian P. [3 ]
机构
[1] Johns Hopkins Univ, Zanvyl Krieger Sch Arts & Sci, Baltimore, MD 21218 USA
[2] Corning Adv Opt, Fairport, NY 14450 USA
[3] Corning Adv Opt, Keene, NH 03431 USA
关键词
Multiband high reflective optics; Diamond-turned and optically polished aluminum alloy; HfO2/SiO2 multilayer coating; Laser-induced damage; LASER-INDUCED DAMAGE;
D O I
10.1016/j.tsf.2015.04.032
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Laser durable multiband high reflective optics can be attained by depositing HfO2/SiO2 stacks on diamond-turned and optically polished aluminum alloy substrates. HfO2 and SiO2 single layers were prepared using modified plasma-ion assisted deposition. Ellipsometric measurements were performed using two types of variable angle spectroscopic ellipsometry with a combined spectral range of 150 nm to 14 mu m. Optical constants were generated in the entire spectral range. Scatter loss as a function of surface roughness was calculated at 1064 nm, 1572 nm, and 4.1 mu m, representing a primary wavelength, a secondary wavelength, and a middle wave infrared band selected for a dual-wavelength laser beam expander, respectively. The surface requirement of the aluminum alloy substrates was determined. Calculated and measured spectral reflectances were compared. Laser-induced damage threshold tests were performed at 1064 nm, 20 ns, and 20 Hz. A laser-induced damage threshold of 47 J/cm(2) was determined. Post-damage analysis suggests that nodule defects are the limiting factor for the laser-induced damage threshold. Surface modification of the aluminum alloy was identified as a potential technical solution that may further increase the laser damage resistance of the dielectric enhanced dual-wavelength reflective optics. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:232 / 236
页数:5
相关论文
共 16 条
[1]   Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared [J].
Bright, T. J. ;
Watjen, J. I. ;
Zhang, Z. M. ;
Muratore, C. ;
Voevodin, A. A. .
THIN SOLID FILMS, 2012, 520 (22) :6793-6802
[2]   Nanosecond laser-induced damage of nodular defects in dielectric multilayer mirrors [Invited] [J].
Cheng, Xinbin ;
Tuniyazi, Abudusalamu ;
Zhang, Jinlong ;
Ding, Tao ;
Jiao, Hongfei ;
Ma, Bin ;
Wei, Zeyong ;
Li, Hongqiang ;
Wang, Zhanshan .
APPLIED OPTICS, 2014, 53 (04) :A62-A69
[3]   Laser damage study of nodules in electron-beam-evaporated HfO2/SiO2 high reflectors [J].
Cheng, Xinbin ;
Shen, Zhengxiang ;
Jiao, Hongfei ;
Zhang, Jinlong ;
Ma, Bin ;
Ding, Tao ;
Lu, Jiangtao ;
Wang, Xiaodong ;
Wang, Zhanshan .
APPLIED OPTICS, 2011, 50 (09) :C357-C363
[4]   RELATIONSHIP OF THE TOTAL INTEGRATED SCATTERING FROM MULTILAYER-COATED OPTICS TO ANGLE OF INCIDENCE, POLARIZATION, CORRELATION LENGTH, AND ROUGHNESS CROSS-CORRELATION PROPERTIES [J].
ELSON, JM ;
RAHN, JP ;
BENNETT, JM .
APPLIED OPTICS, 1983, 22 (20) :3207-3219
[5]   Effects of thermal treatment on infrared optical properties of SiO2 films on Si Substrates [J].
Ji, Yiqin ;
Jiang, Yugang ;
Liu, Huasong ;
Wang, Lishuan ;
Liu, Dandan ;
Jiang, Chenghui ;
Fan, Rongwei ;
Chen, Deying .
THIN SOLID FILMS, 2013, 545 :111-115
[6]   INTERPRETATION OF INFRARED TRANSMITTANCE SPECTRA OF SIO2 THIN-FILMS [J].
KUCIRKOVA, A ;
NAVRATIL, K .
APPLIED SPECTROSCOPY, 1994, 48 (01) :113-120
[7]   Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films [J].
Modreanu, M. ;
Sancho-Parramon, J. ;
Durand, O. ;
Servet, B. ;
Stchakovsky, M. ;
Eypert, C. ;
Naudin, C. ;
Knowles, A. ;
Bridou, F. ;
Ravet, M. -F. .
APPLIED SURFACE SCIENCE, 2006, 253 (01) :328-334
[8]   Development of high-power laser coatings [J].
Qi, Hongji ;
Zhu, Meipin ;
Fang, Ming ;
Shao, Shuying ;
Wei, Chaoyang ;
Yi, Kui ;
Shao, Jianda .
HIGH POWER LASER SCIENCE AND ENGINEERING, 2013, 1 (01) :36-43
[9]  
Soileau M. J., 2008, SPIE, V7132, P7132
[10]  
Stolz C.J., 2008, P SOC PHOTO-OPT INS, V7132