Synthesis of terbia doped yttria stabilized zirconia thin films by using the electrostatic spray deposition (ESD) technique

Terbia doped yttria stabilized zirconia (Tb-YSZ) thin films have been deposited on various substrates by applying the electrostatic spray deposition (ESD) technique. Yttrium- and zirconium-acetylacetonate as well as terbium-acetate hydrate were used as precursors. Butyl carbitol-ethanol mixed alcohol's with ratios of 50:50 vol% and 80:20 vol% were used as solvents for precursor solutions with total metal concentrations between 0.09 M and 0.009 M. Tb-YSZ thin films were deposited at temperatures between 520 K and 730 K. Surface morphology, chemistry, and crystal structure were studied using scanning electron microscopy (SEM), energy dispersive X-ray (EDX), and X-ray diffraction (XRD). The Tb-YSZ layers consist of a fully stabilized cubic phases. The surface morphology of deposited Tb-YSZ layers can be controlled by changing different deposition parameters. The adhesion of Tb-YSZ to the substrate can be improved by a high temperature treatment.