Nanotomography based on hard x-ray microscopy with refractive lenses

被引：53

作者：

Schroer, CG

Meyer, J

Kuhlmann, M

Benner, B

Günzler, TF

Lengeler, B

Rau, C

Weitkamp, T

Snigirev, A

Snigireva, I

机构：

[1] Rhein Westfal TH Aachen, Inst Phys 2, D-52056 Aachen, Germany

[2] European Synchrotron Radiat Facil, F-38043 Grenoble, France

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 08期

关键词：

D O I：

10.1063/1.1501451

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Based on parabolic refractive x-ray lenses we have built a hard x-ray microscope that allows one to image the interior of opaque samples with submicrometer resolution. We have combined magnified imaging with tomography to obtain the three-dimensional structure of the sample at a resolution well below 1 mum. Using an aluminum lens to record a magnified tomogram of a test sample (microprocessor), a resolution of slightly above 400 nm was found for the three-dimensional reconstruction. Lenses made of beryllium are expected to improve this resolution to well below 100 nm. The resulting challenges concerning instrumentation and numerical methods are discussed. (C) 2002 American Institute of Physics.

引用

页码：1527 / 1529

页数：3

共 19 条

[1] HIGH-RESOLUTION TOMOGRAPHY WITH CHEMICAL SPECIFICITY [J].

BONSE, U ;

JOHNSON, Q ;

NICHOLS, M ;

NUSSHARDT, R ;

KRASNICKI, S ;

KINNEY, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :644-648

[2] Holotomography: Quantitative phase tomography with micrometer resolution using hard synchrotron radiation x rays [J].

Cloetens, P ;

Ludwig, W ;

Baruchel, J ;

Van Dyck, D ;

Van Landuyt, J ;

Guigay, JP ;

Schlenker, M .

APPLIED PHYSICS LETTERS, 1999, 75 (19) :2912-2914

[3] Observation of microstructure and damage in materials by phase sensitive radiography and tomography [J].

Cloetens, P ;

PateyronSalome, M ;

Buffiere, JY ;

Peix, G ;

Baruchel, J ;

Peyrin, F ;

Schlenker, M .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (09) :5878-5886

[4] 3-DIMENSIONAL X-RAY MICROTOMOGRAPHY [J].

FLANNERY, BP ;

DECKMAN, HW ;

ROBERGE, WG ;

DAMICO, KL .

SCIENCE, 1987, 237 (4821) :1439-1444

[5]

Kak A.C. Slaney M., 1999, PRINCIPLES COMPUTERI

[6] X-ray imaging with submicrometer resolution employing transparent luminescent screens [J].

Koch, A ;

Raven, C ;

Spanne, P ;

Snigirev, A .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1998, 15 (07) :1940-1951

[7] Phase contrast hard x-ray microscopy with submicron resolution [J].

Lagomarsino, S ;

Cedola, A ;

Cloetens, P ;

DiFonzo, S ;

Jark, W ;

Soullie, G ;

Riekel, C .

APPLIED PHYSICS LETTERS, 1997, 71 (18) :2557-2559

[8] DEVELOPMENT OF A HARD X-RAY-IMAGING MICROSCOPE [J].

LAI, B ;

YUN, W ;

XIAO, Y ;

YANG, L ;

LEGNINI, D ;

CAI, Z ;

KRASNOPEROVA, A ;

CERRINA, F ;

DIFABRIZIO, E ;

GRELLA, L ;

GENTILI, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (02) :2287-2289

[9] Imaging by parabolic refractive lenses in the hard X-ray range [J].

Lengeler, B ;

Schroer, C ;

Tümmler, J ;

Benner, B ;

Richwin, M ;

Snigirev, A ;

Snigireva, I ;

Drakopoulos, M .

JOURNAL OF SYNCHROTRON RADIATION, 1999, 6 :1153-1167

[10] A microscope for hard x rays based on parabolic compound refractive lenses [J].

Lengeler, B ;

Schroer, CG ;

Richwin, M ;

Tümmler, J ;

Drakopoulos, M ;

Snigirev, A ;

Snigireva, I .

APPLIED PHYSICS LETTERS, 1999, 74 (26) :3924-3926

← 1 2 →