Axicon-type test interferometer for cylindrical surfaces: Systematic error assessment

被引：20

作者：

Lindlein, N

Schreiner, R

Brinkmann, S

Dresel, T

Schwider, J

机构：

[1] Lehrstuhl fór Optik, Universität Erlangen-Nórnberg, Physikalisches Institut, Erlangen, D-91058

来源：

APPLIED OPTICS | 1997年 / 36卷 / 13期

关键词：

axicon-type test interferometer; alignment aberration functions; cylinder test; ray tracing;

D O I：

10.1364/AO.36.002791

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The principle and the alignment aberration functions are described for an axicon-type test interferometer for measuring cylindrical mantle surfaces. Additionally, we show that the derived systematic alignment functions fulfill for reasonably small misalignments the requirements for measurements in the range of approximately 1/100 of a fringe. We verify this with optical path-length calculations, using ray tracing. (C) 1997 Optical Society of America.

引用

页码：2791 / 2795

页数：5

共 7 条

[1]

Brinkmann S, 1996, OPTIK, V102, P106

[2] Grazing incidence interferometry applied to the measurement of cylindrical surfaces [J].