Development, modeling and certain investigations on thermal mass flow meters

被引:26
作者
Viswanathan, M [1 ]
Kandaswamy, A [1 ]
Sreekala, SK [1 ]
Sajna, KV [1 ]
机构
[1] Fluid Control Res Inst, Palakkad 678623, Kerala, India
关键词
modeling; thermal mass flow meter; computational fluid dynamics; calibration; accuracy; gases;
D O I
10.1016/S0955-5986(02)00002-X
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper discusses a thermal mass bypass flow meter giving details of its design, principle of operation. calibration, and testing of effects of ambient temperature and orientation. Results of a computer model of the meter are also given. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:353 / 360
页数:8
相关论文
共 11 条
[1]  
BARTOS FJ, 1995, CONTROL ENG, P54
[2]  
HALL R, 1990, INTECH, V37, P45
[3]  
HARDY JE, 1999, FLOW MEASUREMENT MET, P136
[4]   TOWARD UNDERSTANDING THE FUNDAMENTAL MECHANISMS AND PROPERTIES OF THE THERMAL MASS-FLOW CONTROLLER [J].
HINKLE, LD ;
MARIANO, CF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :2043-2047
[5]   THERMAL MASS-FLOW METER [J].
HUIJSING, JH ;
VANDORP, ALC ;
LOOS, PJG .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1988, 21 (10) :994-997
[6]   CHARACTERISTICS OF A THERMAL GAS FLOWMETER [J].
KOMIYA, K ;
HIGUCHI, F ;
OHTANI, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (03) :477-479
[7]  
KREITH F, 1986, PRINCIPLES HEAT TRAN, P665
[8]  
LAW M, 1994, THESIS CRANFIELD U, P44
[9]   THERMAL ANEMOMETRY FOR MASS-FLOW MEASUREMENT IN OSCILLATING CRYOGENIC GAS-FLOWS [J].
RAWLINS, W ;
RADEBAUGH, R ;
TIMMERHAUS, KD .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (11) :3229-3235
[10]   A critical evaluation of thermal mass flow meters [J].
Tison, SA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04) :2582-2591