Application of boron-doped diamond film and ZnO layer in the Fabry-Perot interferometer

被引:0
作者
Majchrowicz, D. [1 ]
Den, W. [1 ]
Jedrzejewska-Szczerska, M. [1 ]
机构
[1] Gdansk Univ Technol, Fac Elect Telecommun & Informat, Dept Metrol & Optoelect, Gabriela Narutowicza St 11-12, PL-80233 Gdansk, Poland
来源
11TH CONFERENCE ON INTEGRATED OPTICS: SENSORS, SENSING STRUCTURES, AND METHODS | 2016年 / 10034卷
关键词
Fabry-Perot interferometer; optic fibers; boron-doped diamond film; ZnO layer; SILICA OPTICAL-FIBERS; CVD DIAMOND; SENSOR; FILTER;
D O I
10.1117/12.2243999
中图分类号
TP7 [遥感技术];
学科分类号
081102 ; 0816 ; 081602 ; 083002 ; 1404 ;
摘要
In this article there have been presented the use of boron-doped diamond films for sensor applications. The low-finesse Fabry-Perot interferometer working in the reflective mode has been implemented. Two kinds of reflective layers have been elaborated: boron-doped diamond thin films and zinc-oxide (ZnO) layer. Thin ZnO layers were deposited by Atomic Layer Deposition (ALD) on the face of a standard telecommunication single-mode optical fiber (SMF-28). Boron-doped diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (mu PE CVD) system. Measurements were performed for various lengths of the air cavity in the reflective mode. The cavity length was varied from 0 mu m to 600 mu m in increments of 50 mu m. Representative measured spectra obtained with a cavity length of 100 mu m. The preliminary investigation of elaborated the low-coherence interferometers Fabry-Perot have shown their ability for their application in sensors applications.
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页数:6
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