The impact of self-assembled monolayer thickness in hybrid gate dielectrics for organic thin-film transistors

被引：76

作者：

Jedaa, Abdesselam ^{[1
]}

Burkhardt, Martin ^{[1
]}

Zschieschang, Ute ^{[2
]}

Klauk, Hagen ^{[2
]}

Habich, Dana ^{[3
]}

Schmid, Guenter ^{[3
]}

Halik, Marcus ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Dept Mat Sci, D-91058 Erlangen, Germany

[2] Max Planck Inst Solid State Res, D-70569 Stuttgart, Germany

[3] Siemens AG CT MM 1, D-91058 Erlangen, Germany

来源：

ORGANIC ELECTRONICS | 2009年 / 10卷 / 08期

关键词：

Self-assembled monolayer; Hybrid gate dielectrics; Organic thin film-transistor; AREA MOLECULAR JUNCTIONS; FIELD-EFFECT TRANSISTORS; LOW-VOLTAGE; COMPLEMENTARY CIRCUITS; INSULATING FILMS; CHAIN-LENGTH; SILICON; SURFACES; DENSITY;

D O I：

10.1016/j.orgel.2009.08.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have investigated the electrical characteristics of hybrid dielectrics with a thickness of 6 nm or less that are composed of a plasma-grown aluminum oxide (AlOx) layer and a self-assembled monolayer (SAM) of an aliphatic phosphonic acid. The impact of the quality of the AlOx layer on the insulating properties of the double-layer dielectrics was assessed by comparing two different oxidation procedures, and the influence of the thickness of the organic SAM was evaluated by employing molecules with five different chain lengths. In order to decouple the relative contributions of the oxide and the SAM to the performance of the double-layer dielectrics we have also performed cyclic voltammetry measurements on indium tin oxide (ITO)/SAM devices without AlOx layer. Finally, we have evaluated how the quality of the AlOx layer and the thickness of the SAM affect the performance of low-voltage organic thin-film transistors (TFTs) that employ the thin AlOx/SAM dielectrics as the gate dielectric. The results confirm the important role of the SAM in determining the breakdown voltage, in limiting the current density, and in compensating the somewhat lower quality of AlOx layers produced under mild plasma conditions. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：1442 / 1447

页数：6

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