Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT

被引：0

作者：

Wang, Haoran ^{[1
]}

Yu, Yuanyuan ^{[1
,2
]}

Chen, Zhenfang ^{[3
]}

Yang, Hao ^{[4
]}

Jiang, Huabei ^{[4
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32601 USA

[2] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin, Peoples R China

[3] MEMS Engn & Mat Inc, Sunnyvale, CA USA

[4] Univ S Florida, Dept Med Engn, Tampa, FL USA

来源：

2018 IEEE SENSORS | 2018年

关键词：

pMUT; micromachined transducers; ultrasonic transducers; ceramic PZT; piezoelectric;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a piezoelectric micromachined ultrasonic transducer (pMUT) array fabricated using high-piezoelectric-coefficient ceramic PZT wafers. A new process for polishing ceramic PZT layers down to 5 pm has been developed and applied for manufacturing high-sensitivity pMUTs. A 2 MHz working pMUT array (8x8 elements) based on ceramic PZT has been designed, modeled, fabricated and characterized.

引用

页码：986 / 989

页数：4

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