Atomic layer deposited films of Al2O3 on fluorine-doped tin oxide electrodes: stability and barrier properties

被引:5
作者
Krysova, Hana [1 ]
Neumann-Spallart, Michael [2 ]
Tarabkova, Hana [1 ]
Janda, Pavel [1 ]
Kavan, Ladislav [1 ]
Krysa, Josef [2 ]
机构
[1] Czech Acad Sci, J Heyrovsky Inst Phys Chem, Dolejskova 2155-3, Prague 18223 8, Czech Republic
[2] Univ Chem & Technol Prague, Dept Inorgan Technol, Tech 5, Prague 16628 6, Czech Republic
关键词
Al2O3; atomic layer deposition (ALD); barrier properties; corrosion; electrochemistry; FTO; THIN-FILMS; TIO2; ZNO; TRANSPARENT; PHOTOANODES; PROTECTION; TITANIA;
D O I
10.3762/bjnano.12.2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Al2O3 layers were deposited onto electrodes by atomic layer deposition. Solubility and electron-transport blocking were tested. Films deposited onto fluorine-doped tin oxide (FTO, F:SnO2 /glass) substrates blocked electron transfer to redox couples (ferricyanide/ferrocyanide) in aqueous media. However, these films were rapidly dissolved in 1 M NaOH (approximate to 100 nm/h). The dissolution was slower in 1 M H2SO4 (1 nm/h) but after 24 h the blocking behaviour was entirely lost. The optimal stability was reached at pH 7.2 where no changes were found up to 24 h and even after 168 h of exposure the changes in the blocking behaviour were still minimal. This behaviour was also observed for protection against direct reduction of FTO.
引用
收藏
页码:24 / 34
页数:11
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