Long term oxidation behavior of micro- and nano-crystalline CVD diamond foils

被引：8
作者：
Fecher, Jonas [1 ]
Wormser, Maximilian [1 ]
Rosiwal, Stefan M. [1 ]
机构：
[1] Univ Erlangen Nurnberg, Chair Met Sci & Technol WTM, Martensstr 5, D-91058 Erlangen, Germany
来源：
DIAMOND AND RELATED MATERIALS | 2016年 / 61卷
关键词：
Hot filament CVD; Long term; Oxidation; Thermal stability; Diamond foils; nanocrystalline diamond; Microcrystalline diamond; GROWTH; CARBON; RAMAN;
D O I：
10.1016/j.diamond.2015.11.009
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nano- and micro-crystalline diamond foils with a thickness of at least 30 pm are manufactured by hot-filament chemical vapor deposition (HFCVD) in an industrial coating machine. Some of them are doped with trimethylborate. The diamond foils are exposed to air at 450 degrees C and 500 degrees C and oxidized for up to 738 h. At these temperatures all investigated diamond foils exhibit a substantial weight loss, which is measured with a high precision balance. Nanocrystalline diamond foils show a high weight loss rate compared to microcrystalline diamond foils. At 500 degrees C the weight loss rate is two to seven times higher than that at 450 degrees C. Grain boundaries and small diamond crystals are etched much faster than larger diamond crystal. The incorporation of boron does not significantly affect the oxidation of the diamond foils. (C) 2015 Elsevier B.V. All rights reserved.
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页码：41 / 45
页数：5
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