CO2 Gas Sensor based on BaTiO3 Thin Film Deposited via Ultrasonic Spray

被引：0

作者：

Hijazi, Mohamad ^{[1
]}

Bernardini, Sandrine ^{[1
]}

Le Pennec, Fabien ^{[1
]}

Aguir, Khalifa ^{[1
]}

Seguin, Luc ^{[1
]}

Bendahan, Marc ^{[1
]}

机构：

[1] Univ Toulon & Var, Aix Marseille Univ, CNRS, IM2NP, Marseille, France

来源：

2018 IEEE SENSORS | 2018年

关键词：

BaTiO3; SnO2; spray; thin film; CO2 gas sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new approach for thin layer deposition to elaborate CO2 sensitive layers is demonstrated in this work. BaTiO3 was used as CO2 sensitive materials and SnO2 as a reference as well as to enhance the resistance of BaTiO3 film. BaTiO3 solution was elaborated by the dispersion of commercial nano-powder in ethanol. A simple sol-gel in ethanol was used to synthesize SnO2 precursor. SnO2 and BaTiO3-SnO2 thin films were deposited on SiO2 substrate by ultrasonic spray method. SnO2 shows no response to CO2 while BaTiO3-SnO2 gives response to 400 and 4000 ppm of CO2. These results are promising to continue working with this method.

引用

页码：848 / 850

页数：3

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