Tunable Electromechanical Properties of a Barium Strontium Titanate Ferroelectric Film Under a Uniaxial Stress

The possibility of the development of MEMS devices based on the tunable ferroelectric film Ba0.8Sr0.2O3 properties under uniaxial deformation was studied theoretically. The thermodynamic model of the phase transitions for the film under uniaxial stress was constructed. The behavior of the material constants for the film in various phase states was investigated. The propagation properties of the surface acoustic wave (SAW) under the uniaxial stress were studied for the film located on the single-crystal silicon substrate. It was shown that the SAW resonance frequency changes within 3 MHz for the frequency of 274 MHz, and 9 MHz for the frequency of 512 MHz.