Tunable Electromechanical Properties of a Barium Strontium Titanate Ferroelectric Film Under a Uniaxial Stress

被引：5

作者：

Shirokov, Vladimir Borisovich ^{[1
]}

Timoshenko, Pavel Evgenjevich ^{[2
]}

Pan'kin, Artyom Vital'yevich ^{[1
]}

Razumnaya, Anna Grigoryevna ^{[2
]}

机构：

[1] Russian Acad Sci, Southern Sci Ctr, Moscow 119991, Russia

[2] Southern Fed Univ, Fac Phys, Rostov Na Donu 344090, Russia

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2020年 / 67卷 / 12期

关键词：

Substrates; Thermodynamics; Mathematical model; Uniaxial strain; Stress; Acoustics; Barium strontium titanate (BST); ferroelectrics; finite-element modeling; material constants; phenomenological theory; surface acoustic waves (SAWs); MATERIAL CONSTANTS; THIN;

D O I：

10.1109/TUFFC.2020.3011591

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The possibility of the development of MEMS devices based on the tunable ferroelectric film Ba0.8Sr0.2O3 properties under uniaxial deformation was studied theoretically. The thermodynamic model of the phase transitions for the film under uniaxial stress was constructed. The behavior of the material constants for the film in various phase states was investigated. The propagation properties of the surface acoustic wave (SAW) under the uniaxial stress were studied for the film located on the single-crystal silicon substrate. It was shown that the SAW resonance frequency changes within 3 MHz for the frequency of 274 MHz, and 9 MHz for the frequency of 512 MHz.

引用

页码：2704 / 2709

页数：6

共 50 条

[1] Dielectric and tunable properties of barium strontium titanate ceramics under the stresses
Zhang, Qiwei
Zhai, Jiwei
Yao, Xi
JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (34) : 8577 - 8580
[2] Scaling Issues in Ferroelectric Barium Strontium Titanate Tunable Planar Capacitors
Lam, Peter G.
Haridasan, Vrinda
Feng, Zhiping
Steer, Michael B.
Kingon, Angus I.
Maria, Jon-Paul
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2012, 59 (02) : 198 - 204
[3] Optical properties of barium strontium titanate (BST) ferroelectric thin films
Bain, A. K.
Jackson, T. J.
Koutsonas, Yiannis
Cryan, M.
Yu, S.
Hill, M.
Varrazza, R.
Rorison, J.
Lancaster, M. J.
FERROELECTRICS LETTERS SECTION, 2007, 34 (5-6) : 149 - 154
[4] Intrinsically Switchable Filter Bank Employing Ferroelectric Barium Strontium Titanate
Koohi, Milad Zolfagharloo
Mortazawi, Amir
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2018, 66 (12) : 5501 - 5507
[5] Electromechanical Properties of Robocasted Barium Titanate Ceramics
Lorenz, Mylena
Martin, Alexander
Webber, Kyle G.
Travitzky, Nahum
ADVANCED ENGINEERING MATERIALS, 2020, 22 (09)
[6] Exploring the low temperature fabrication and properties of barium strontium titanate tunable dielectric ceramics
Ribeiro, Camila
Tkach, Alexander
Costa, M. Elisabete
Vilarinho, Paula M.
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2024, 44 (08) : 4985 - 4991
[7] Electric-field-dependent mechanical and electrical properties of barium strontium titanate films for tunable device applications
Shirokov, V. B.
Kalinchuk, V. V.
Timoshenko, P. E.
THIN SOLID FILMS, 2018, 657 : 8 - 15
[8] Piezoelectric coefficients of the barium-strontium titanate film on a (111)-oriented substrate
Shirokov, V. B.
Shakhovoy, R. A.
Pan'kin, A. V.
Kalinchuk, V. V.
2017 5TH INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING, MATERIALS SCIENCE AND CIVIL ENGINEERING, 2018, 324
[9] DEVELOPMENT OF TUNABLE DEVICES USING BARIUM STRONTIUM TITANATE THIN FILMS
Morito, K.
Natsume, M.
Sekiguchi, S.
PROCEEDINGS OF THE 12TH PACIFIC RIM CONFERENCE ON CERAMIC AND GLASS TECHNOLOGY, 2018, 264 : 179 - 190
[10] Dielectric properties of samarium substituted barium strontium titanate
Thakur, OP
Prakash, C
PHASE TRANSITIONS, 2003, 76 (06) : 567 - 574

← 1 2 3 4 5 →