Current Transport and Dielectric Analysis of Ni/SiO2/P-Si Diode Prepared by Liquid Phase Epitaxy

被引:15
作者
Ashery, A. [1 ]
Elnasharty, Mohamed M. M. [2 ]
El Radaf, I. M. [3 ,4 ]
机构
[1] Natl Res Ctr, Solid State Phys Dept, Phys Div, Solid State Elect Lab, Giza 12622, Egypt
[2] Natl Res Ctr, Microwave Phys & Dielect Dept, Giza 12622, Egypt
[3] Natl Res Ctr, Electron Microscope & Thin Films Dept, Phys Div, Giza 12622, Egypt
[4] Qassim Univ, Mat Phys & Energy Lab, Coll Sci & Art ArRass, Arrass 51921, Saudi Arabia
关键词
MIS diode; Liquid phase epitaxial; X-ray diffraction; Series resistance; Diode ideality factor; Ac conductivity; ELECTRICAL CHARACTERIZATION; IMPEDANCE SPECTROSCOPY; SEMICONDUCTOR; PARAMETERS; CONDUCTIVITY;
D O I
10.1007/s12633-020-00808-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Herein, the Ni/SiO2/p-Si MIS diode was developed via the liquid phase epitaxy (LPE) process. The structural and surface morphology were investigated by XRD and SEM techniques. The electrical study of the device, Ni/SiO2/n-Si, demonstrates a worthy rectification and the electrical parameters of the Schottky diode have computed using the I-V characterization. Different dielectric parameters as capacitance (C), permittivity (epsilon'), dielectric loss (epsilon"), conductance and ac conductivity (sigma(ac)) were evaluated. Moreover, their relation to bias dc voltage has been examined in the frequency range 10 Hz-20 MHz, temperature 303 K to 363 K and DC bias voltage from -2 V to 2 V. Also, the variable investigated parameters were found to be dependent upon temperature, frequency and bias voltage.
引用
收藏
页码:153 / 163
页数:11
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