Characterization of ferroelectric SBT thin films prepared by sol-gel process

被引：0

作者：

Jang, HH ^{[1
]}

Song, SP ^{[1
]}

Kim, BH ^{[1
]}

机构：

[1] Korea Univ, Dept Mat Sci & Engn, Seoul 136701, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 1999年 / 35卷

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Ferroelectric Sr1-xBi2+xTa2O9 (0 less than or equal to x less than or equal to 0.3) solutions were synthesized using sol-gel process in which alkoxide precursors were used as starting materials. Thin films were coated on Pt/Ti/SiO2/Si substrates by spin-coating. Rapid thermal annealing (RTA) was used to promote crystallization. Thin films were annealed in oxygen atmosphere. Pt top-electrode was deposited by sputtering and thin films were post-annealed to enhance electrical properties. Fluorite phase transformed to layered perovskite phase with annealing temperatures up to 700 degrees C. Desirable dielectric property was obtained at composition of Sr0.9Bi2.1Ta2O9. As the RTA temperature increase, the higher 2Pr values were obtained. At RTA temperature being 780 degrees C remanent polarization value of Sr0.9Bi2.1Ta2O9 thin film was 7.73 mu C/cm(2) and leakage current density value was 1.14 x 10(-7) A/cm(2) at 3 V.

引用

页码：S1223 / S1226

页数：4

共 50 条

[21] Photoluminescence of langasite thin films prepared from sol-gel process [J].

Hu, Yi ;

Wang, Feng-Wei ;

Lin, Hur-Lon .

MATERIALS CHEMISTRY AND PHYSICS, 2008, 107 (01) :82-84

[22] ZnO thin films prepared by a single step sol-gel process [J].

O'Brien, Shane ;

Koh, L. H. K. ;

Crean, Gabriel M. .

THIN SOLID FILMS, 2008, 516 (07) :1391-1395

[23] Crystallisation kinetics of hydroxyapatite thin films prepared by sol-gel process [J].

Najafi, H. ;

Nemati, A. ;

Sadeghian, Z. .

ADVANCES IN APPLIED CERAMICS, 2010, 109 (06) :313-317

[24] Optical properties of ZnO thin films prepared by sol-gel process [J].

Petersen, J. ;

Brimont, C. ;

Gallart, M. ;

Cregut, O. ;

Schmerber, G. ;

Gilliot, P. ;

Hoenerlage, B. ;

Ulhaq-Bouillet, C. ;

Rehspringer, J. L. ;

Leuvrey, C. ;

Colis, S. ;

Slaoui, A. ;

Dinia, A. .

MICROELECTRONICS JOURNAL, 2009, 40 (02) :239-241

[25] SnO2 thin films prepared by the sol-gel process [J].

Racheva, TM ;

Critchlow, GW .

THIN SOLID FILMS, 1997, 292 (1-2) :299-302

[26] Nanocrystalline titanium oxide thin films prepared by sol-gel process [J].

Viana, Marcelo M. ;

Mohallem, Thrik D. S. ;

Nascimento, Gabriel L. T. ;

Mohallem, Nelcy D. S. .

BRAZILIAN JOURNAL OF PHYSICS, 2006, 36 (3B) :1081-1083

[27] Characterization of PZT thin films prepared by a modified sol-gel method [J].

Matthes, B ;

Tomandl, G ;

Werner, G .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1999, 19 (6-7) :1387-1389

[28] Synthesis and characterization of BNT thin films prepared by Sol-Gel method [J].

Abou Dargham, S. ;

Ponchel, F. ;

Zaatar, Y. ;

Assaad, J. ;

Remiens, D. ;

Zaouk, D. .

MATERIALS TODAY-PROCEEDINGS, 2016, 3 (03) :810-815

[29] Characterization of iron oxide thin films prepared by sol-gel processing [J].

Karakuscu, Aylin ;

Ozenbas, Macit .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2008, 8 (02) :901-906

[30] Characterization of ITO thin films prepared by spinning deposition starting from a sol-gel process [J].

Stoica, TF ;

Stoica, TA ;

Zaharescu, M ;

Popescu, M ;

Sava, F ;

Popescu-Pogrion, N ;

Frunza, L .

JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2000, 2 (05) :684-688

← 1 2 3 4 5 →