Flexible transparent oxide electrode on regenerated cellulose

被引：2
作者：
Lim, Byung-Wook [1 ,2 ]
Kim, Young-Baek [2 ]
Song, Sang-In [2 ]
Lee, Young-Jun [1 ]
Kim, Joo-Hyung [1 ]
机构：
[1] Inha Univ, Dept Mech Engn, Lab Intelligent Devices & Thermal Control, Inchon 402751, South Korea
[2] Korea Inst Technol KITECH, Natl Ctr Nanoproc & Equipment, Kwangju, South Korea
来源：
MATERIALS RESEARCH BULLETIN | 2014年 / 58卷
关键词：
Oxides; Sputtering; X-ray diffraction; Electrical properties; Electronic materials;
D O I：
10.1016/j.materresbull.2014.04.040
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The demand for flexible transparent conducting oxides (TCOs) for optoelectronic applications, such as touch panels, flat panel displays, organic light-emitting diodes (OLEDs) and other mobile devices, has been increasing continuously. To produce flexible TCOs electrodes, amorphous ZnO-doped ITO (ZITO) films were deposited on flexible transparent cellulose, PES and glass substrates by RF sputtering using a single target (In2O3 50.7/ZnO 44.4/SnO2 4.9 mol%). With increasing oxygen ratio during ZITO film deposition, the sheet resistance increased linearly, whereas the carrier density decreased, which may be due to the rough surface of cellulose caused by the regeneration film process. The overall electrical performance of ZITO was found to be comparable to that of the other transparent substrates. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码：136 / 140
页数：5
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