Reliable Control of Filament Formation in Resistive Memories by Self-Assembled Nanoinsulators Derived from a Block Copolymer

被引:104
作者
You, Byoung Kuk [1 ]
Park, Woon Ik [1 ]
Kim, Jong Min [1 ]
Park, Kwi-Il [1 ]
Seo, Hyeon Kook [1 ,2 ]
Lee, Jeong Yong [1 ,2 ]
Jung, Yeon Sik [1 ]
Lee, Keon Jae [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
[2] Ctr Nano React, Inst Basic Sci, Taejon 305701, South Korea
基金
新加坡国家研究基金会;
关键词
block copolymers; self-assembly; resistive memory; conductive filament; TRANSITION-METAL OXIDES; ELECTROLYTE-BASED RERAM; NONVOLATILE MEMORY; SWITCHING MEMORIES; CONDUCTIVE FILAMENTS; THIN-FILMS; LITHOGRAPHY; NANOSTRUCTURES; NANOFILAMENTS; PHOTORESIST;
D O I
10.1021/nn503713f
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Resistive random access memory (ReRAM) is a promising candidate for future nonvolatile memories. Resistive switching in a metal insulator metal structure is generally assumed to be caused by the formation/rupture of nanoscale conductive filaments (CFs) under an applied electric field. The critical issue of ReRAM for practical memory applications, however, is insufficient repeatability of the operating voltage and resistance ratio. Here, we present an innovative approach to reliably and reproducibly control the CF growth in unipolar NiO resistive memory by exploiting uniform formation of insulating SiOx nanostructures from the self-assembly of a Si-containing block copolymer. In this way, the standard deviation (SD) of set and reset voltages was markedly reduced by 76.9% and 59.4%, respectively. The SD of high resistance state also decreased significantly, from 63 x 10(7) Omega to 5.4 x 104 Omega. Moreover, we report direct observations of localized metallic Ni CF formation and their controllable growth using electron microscopy and discuss electrothermal simulation results based on the finite element method supporting our analysis results.
引用
收藏
页码:9492 / 9502
页数:11
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