ULTRA SMALL SINGLE WALLED CARBON NANOTUBE PRESSURE SENSORS

被引：16

作者：

Helbling, T. ^{[1
]}

Drittenbass, S. ^{[1
]}

Durrer, L. ^{[1
]}

Roman, C. ^{[1
]}

Hierold, C. ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Dept Mech & Proc Engn, Zurich, Switzerland

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

FABRICATION;

D O I：

10.1109/MEMSYS.2009.4805447

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the fabrication and characterization of ultra small pressure sensors with individual single-walled carbon nanotube (SWNT) field effect transistors (CNFETs) as strain gauges. The smallest piezoresistive pressure sensor with a membrane diameter of d similar to 40Ftm is fabricated and characterized. This miniaturization is made possible due to the nanoscaled size, electronic properties, and high piezoresistive gauge factors (GF) of SWNTs and is currently limited by the membrane fabrication capabilities using a 200 mu m thick Si wafer. In summary the sensor performance is: Gauge factor: similar to 450 to 700 (strain dependent), sensitivity: -54pA/mbar (V-dS=200mV), resolution: 15mbar, power consumption: -100nW.

引用

页码：575 / 578

页数：4

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