Neutron irradiation effects in p-GaN

被引:30
作者
Polyakov, A. Y.
Smirnov, N. B.
Govorkov, A. V.
Markov, A. V.
Kolin, N. G.
Merkurisov, D. I.
Boiko, V. M.
Shcherbatchev, K. D.
Bublik, V. T.
Voronova, M. I.
Pearton, S. J.
Dabiran, A.
Osinsky, A. V.
机构
[1] Inst Rare Met B, Moscow 119017, Russia
[2] Fed State Unitary Enterprise, Karpov Inst Phys Chem, Obninsk Branch, Obninsk 249033, Russia
[3] Moscow State Inst Steel & Alloys, Semicond Mat Sci Dept, Moscow 119991, Russia
[4] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[5] SVTAssociates, Eden Prairie, MN 55344 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2006年 / 24卷 / 05期
基金
美国国家科学基金会;
关键词
D O I
10.1116/1.2338045
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Electrical properties, admittance, and microcathodoluminescence spectra are compared for p-GaN samples grown by hydride vapor phase epitaxy (HVPE) and by molecular beam epitaxy (MBE). The former are characterized by a high 300 K hole concentration and a weak temperature dependence of conductivity. The latter samples show strongly temperature-activated conductivity due to ionization of Mg acceptors. The main effects of neutron irradiation were similar for the p-HVPE and the p-MBE materials: a compensation of p-type conductivity starting with neutron fluences exceeding 2 X 10(16) cm(-2) and conversion to high resistivity n type with the Fermi level pinned near E-c-(0.8-0.9) eV after irradiation with high doses of 10(18) cm(-2). For the heavily neutron irradiated p-HVPE samples, a strong increase was observed in the c-lattice parameter which indicates an important role for interstitial-type defects. (c) 2006 American Vacuum Society.
引用
收藏
页码:2256 / 2261
页数:6
相关论文
共 31 条
[1]  
Berman L. S., 1995, PURITY CONTROL SEMIC, P180
[2]  
BERMAN LS, 1981, CAPACITANCE SPECTROS
[3]   Doping properties of C, Si, and Ge impurities in GaN and AlN [J].
Boguslawski, P ;
Bernholc, J .
PHYSICAL REVIEW B, 1997, 56 (15) :9496-9505
[4]   A model for Fermi-level pinning in semiconductors: radiation defects, interface boundaries [J].
Brudnyi, VN ;
Grinyaev, SN ;
Kohn, NG .
PHYSICA B-CONDENSED MATTER, 2004, 348 (1-4) :213-225
[5]  
BRUDNYI VN, COMMUNICATION
[6]   Annealing behavior of a proton irradiated AlxGa1-xN/GaN high electron mobility transistor grown by MBE [J].
Cai, SJ ;
Tang, YS ;
Li, R ;
Wei, YY ;
Wong, L ;
Chen, YL ;
Wang, KL ;
Chen, M ;
Zhao, YF ;
Schrimpf, RD ;
Keay, JC ;
Galloway, KF .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (02) :304-307
[7]   Radiation-induced defects in n-type GaN and InN [J].
Emtsev, VV ;
Davydov, VY ;
Haller, EE ;
Klochikhin, AA ;
Kozlovskii, VV ;
Oganesyan, GA ;
Poloskin, DS ;
Shmidt, NM ;
Vekshin, VA ;
Usikov, AS .
PHYSICA B-CONDENSED MATTER, 2001, 308 :58-61
[8]   Deep centers in n-GaN grown by reactive molecular beam epitaxy [J].
Fang, ZQ ;
Look, DC ;
Kim, W ;
Fan, Z ;
Botchkarev, A ;
Morkoc, H .
APPLIED PHYSICS LETTERS, 1998, 72 (18) :2277-2279
[9]  
Fewster P., 2000, XRAY SCATTERING SEMI, P288
[10]   Transport properties of proton-irradiated gallium nitride-based two-dimensional electron-gas system [J].
Gaudreau, F ;
Fournier, P ;
Carlone, C ;
Khanna, SM ;
Tang, HP ;
Webb, J ;
Houdayer, A .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2002, 49 (06) :2702-2707