共 50 条
- [1] Soft-lithographic replication of 3D polymeric microstructures created with MAP MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS V AND MICROFABRICATION PROCESS TECHNOLOGY XII, 2007, 6462
- [2] Soft lithographic fabrication of microresonators 2007 DIGEST OF THE LEOS SUMMER TOPICAL MEETINGS, 2007, : 133 - 134
- [3] Soft lithographic fabrication of microresonators OPTOMECHATRONIC MICRO/NANO DEVICES AND COMPONENTS III, 2007, 6717
- [8] Lithographic fabrication of microstructures by laser ablation using femtosecond laser LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES 2003, 2004, 5399 : 147 - 155
- [9] ELECTRODEPOSITION IN POLYMERIC MICROMOLDS FOR THE FABRICATION OF METALLIC MICROSTRUCTURES PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2010, VOL 7, PTS A AND B, 2012, : 27 - 35
- [10] CMOS device fabrication and the evolution of optical lithographic exposure tools Microelectronic Engineering, 1999, 46 (01): : 7 - 9