Electric field-induced strain of PbZrO3 films

被引:5
作者
Kanno, Isaku [1 ]
Inoue, Takashi [1 ]
Suzuki, Takaaki [1 ]
Kotera, Hidetoshi [1 ]
Wasa, Kiyotaka [1 ]
机构
[1] Kyoto Univ, Dept Micro Engn, Sakyo Ku, Kyoto 6068501, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 9B期
关键词
antiferroelectric; PbZrO3; films; electric field-induced strain;
D O I
10.1143/JJAP.45.7258
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper, we report an electric field-induced strain of antiferroelectric (AFE) PbZrO3 (PZ) films deposited by rf-sputtering. The PZ films grown on the (001)Pt/(001)MgO substrate are preferentially oriented along the c axis in a tetragonal system which is perpendicular to the AFE polar direction. On the other hand, the PZ films on the (111)Pt/Ti/Si substrate have a random orientation, and they show, clear double P-E hysteresis loops, representing the AFE-ferroelectric (FE) phase transition caused by the Application of an electric field. The transverse strain induced by the electric field is evaluated by the measurements of tip displacement of PZ/substrate unimorph cantilevers. The PZ films on the Pt/Ti/Si substrate exhibit clear strain jump corresponding to the AFE-FE phase transition, and a maximum transverse strain of 5 x 10(-5) is obtained at an electric field of -150 kV/cm.
引用
收藏
页码:7258 / 7261
页数:4
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