A FUZZY LOGIC CONTROL STRUCTURE OF A MEMS ACCELEROMETER

A way to improve the transient regime of a miniature accelerometer by using a smart control structure to close its loop is here presented. The control structure is developed by using the fuzzy logic techniques and it replaces an electronic block on the feedback path of the closed loop, block that, in the classical architecture, assured the system damping and, in the same time, played the role of elastic link of the accelerometer proof mass. The paper exposes gradually the operating principle of the miniature accelerometer, its mathematical modeling, the results obtained for classical closed loop architecture, the design procedure for the smart closed-loop control structure, and the results of the smart architecture. Finally, a comparative numerical study between the classical and the proposed accelerometer architectures is made.