OPTIMIZATION OF THE PROCESS OF DEPOSITION OF THIN ANTI-REFLECTIVE COATINGS BASED ON A LIBRARY _ DATABASE OF THE CONTROL SYSTEM IN LABVIEW

被引：0
作者：
Wozny, Krzysztof [1 ,3 ]
Winkowski, Pawel [2 ]
Putynkowski, Grzegorz [3 ]
Marszalek, Konstanty [4 ]
机构：
[1] AGH Univ Sci & Technol, Fac Elect Engn Automat Comp Sci & Biomed Engn, Dept Power Elect & Energy Control Syst, Krakow, Poland
[2] Pevin, Krakow, Poland
[3] CBRTP SA Res & Dev Ctr Technol Ind, Skylight Tower, Warsaw, Poland
[4] AGH Univ Sci & Technol, Fac Comp Sci Elect & Telecommun, Dept Elect, Krakow, Poland
来源：
METAL 2016: 25TH ANNIVERSARY INTERNATIONAL CONFERENCE ON METALLURGY AND MATERIALS | 2016年
关键词：
Process control system; library processes; LabVIEW graphical programming; antireflective coatings; thin films;
D O I：
暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The paper presents a system to optimize, control, visualization and data storage PVD processes. The system has been designed based on LabVIEW and has been successfully used in the optical industry. Visualization is very intuitive for the operator, provides an easy opportunity to control all process parameters. Saved data allow to create a library that allows to improve the quality of coatings and gives you the ability to analyze processes. The low cost of the introduction of the system also makes it a very useful tool for modifying older vacuum coaters and gives a chance to its gradual expansion. The collected libraries allow you to recreate and optimize the process of applying layers of materials.
引用
收藏
页码：1181 / 1186
页数：6
相关论文
共 12 条
  • [1] Asghar M. H., 2003, Semiconductor Physics Quantum Electronics & Optoelectronics, V6, P508
  • [2] DRABIK M., 2009, POSTEPY NAUKI TECHNI, P96
  • [3] GENNICK J, 2011, LEKSYKON KIESZONKOWY
  • [4] JAKUBOWSKI A, 2001, PODSTAWY SQL
  • [5] KUSIAK J., 2013, COMPUTER METHODS MAT, P313
  • [6] LUKASIK L., 2004, ELEKT KONSTRUKCJE TE, P22
  • [7] MANIA R, 2009, ELEKTRONIKA, P85
  • [8] MARSZALEK K. W., 2013, ELEKT KONSTRUKCJE TE, P79
  • [9] Panek P, 2008, ARCH METALL MATER, V53, P103
  • [10] Willey R.R., 2002, PRACTICAL DESIGN PRO
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