Growth and molarity effects on properties of alumina thin films obtained by spray pyrolysis

被引:31
|
作者
Khatibani, A. Bagheri [1 ]
Rozati, S. M. [1 ]
机构
[1] Univ Guilan, Fac Sci, Dept Phys, Rasht 41335, Iran
关键词
Spray pyrolysis; Amorphous materials; Electron microscopy; Surface properties; Optical properties; CHEMICAL-VAPOR-DEPOSITION; PULSED-LASER DEPOSITION; OPTICAL-CONSTANTS; AL2O3; FILMS; ELECTRICAL-PROPERTIES; THICKNESS; TRANSPARENT; GLASS;
D O I
10.1016/j.mssp.2013.11.009
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Various and versatile applications of alumina in materials science and engineering specially in semiconductor and energy conversion technology encouraged us to prepare and investigate its physical properties as much as possible. Hence, after depositing of alumina thin films on glass substrates by a spray pyrolysis technique, structural, morphological, and optical properties of the films were investigated using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FTIR) and UV-visible spectrophotometry. Different optical quantities, such as optical band gap, refractive index and extinction coefficient, were determined in this article for different molarities (from 0.10 M to 0.25 M) at two specific substrate temperatures (250 degrees C and 500 degrees C). XRD results showed the prevailing amorphous phase in all samples as expected, whereas SEM, XPS, and FTIR presented the presence of molarity effects on alumina properties. Decrease of optical transmittance with molarity increase was notable. Using the transmittance data other optical quantities were obtained by a numerical approximation method. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:80 / 87
页数:8
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